Excellent Process Stability
Superior Film Quality
Ready for future Demands
Ultra high-precision optical Coating Equipment for Emerging Technologies
Using advanced reactive sputtering, this tool is suited for mass production of sophisticated coating designs.
We understand that process control plays a critical role in the deposition of optical coatings. SOLAYER’s AVIOR M-300 is separating the material deposition and oxidation of the film, which means a closed-loop process control (e.g. lamda-probe) for reactive deposition process is not required any longer. Furthermore the tool is using a sputter-up (substrate face-down) configuration for minimal particle count. This forward-looking technology delivers an extremely reproducible coating process with intrinsic long-term stability over the complete target lifetime. Optical films are perfectly stoichiometric, shift-free with a unique uniformity of down to 0.2 %.
The tool is equipped with latest optical broadband monitoring for in-situ deposition growth control. The direct communication between the optical design software, the in-situ monitoring and the equipment controller makes the way clear for rapid prototyping and a straightforward design-to-fabrication workflow. No calibration and test runs needed even for complex coatings design with several hundred layers.
AVIOR M-300 is using future-oriented dual-rotary-magnetrons with massively increased material reservoir compared to planar magnetrons. Thus service intervals are increased, process stability improved and production output optimized.
The filed proven production design is equipped with a load lock to allow an automated robot handling. Fully automated handling is a logical build block in the overall concept – no manual handling required any longer. For maximum flexibility in production, the tool is equipped with a carrier system for simple and fast conversion to various substrate shapes and sizes. Depending on the carrier, the system can be equipped with numberless small substrates or 56 x Æ100 mm up to a maximum size of 12 x ∅ 300 mm.
The AVIOR M-300 is suited to deliver a cost-effective mass production with extraordinary film quality and coating precision.