Transforming innovation into processes and products that immensely benefit our customers
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Process Specification
Understanding our customer's specifications and evaluating project feasibility
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Applied Research
Cooperation with Research Institutes, Development of new technologies, IP Management -
Process Management
Development of process technology, material and components / equipment -
Qualification & Testing
Process implementation in tool, parameter optimization and customer's acceptance test
- Our Material and Technology Base -
Application:
- Transparent contact layer and functional interlayers in PV, Display, Semiconductor/ Organic semiconductor and sensor applications
Functional Film:
- ITO, AZO, IGZO, ZnO:X, iZnO, ZnxSnyOz
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, PECVD, evaporation, FLA
Application:
- Contacts, reflector layers, optical filters, low-E , wear resistance and decorative layers
Functional Film:
- Mo, Cr, Al, Ag, Au, Cu, W, Ti, Ni, ZnTe, ZnTe:Cu, stainless steel
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, ALD, IBAD, IBE, RIE, PIII, FLA
Application:
- Barrier, passivation, absorption, reflection and anti-reflection, dielectric, decorative, low-E, wear resistance
Functional Film:
- SiO2, Al2O3, Ta2O5, Nb2O5, TiO2, ZrO2, HfO2, ZnO, WO3
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, PECVD, ALD, IBAD, IBE
Application:
- Barrier, passivation, absorption, reflection and anti-reflection, dielectric, low-E, decorative, wear resistance
Functional Film:
- SiOxNy, TiOxNy, AlOxNy
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, PECVD, ALD, IBAD, IBE
Application:
- Barrier, passivation, absorption, reflection and anti-reflection, dielectric, low-E, decoration, wear resistance
Functional Film:
- SiNx, TiN, AlN and other metal nitrides
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, PECVD, ALD, IBAD, IBE
Application:
- Soft and hard coatings, dielectric, anti-fingerprint, anti-scratch, electrolyte for electrochromics and batteries, substrate cleaning, ion milling, doping and surface patterning
Functional Film and Substrate:
- DLC, AlC, SiC, SiCxOyNz, LiPON and compounds
Si wafer, glass, polymer, metal sheet
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, IBAD, IBE, RIE, PIII, FLA