Transforming innovation into processes and products that immensely benefit our customers
Process Specification
Understanding our customer's specifications and evaluating project feasibility
Applied Research
Cooperation with Research Institutes, Development of new technologies, IP ManagementProcess Management
Development of process technology, material and components / equipmentQualification & Testing
Process implementation in tool, parameter optimization and customer's acceptance test- Our Material and Technology Base -
Application:
- Transparent contact layer and functional interlayers in PV, Display, Semiconductor/ Organic semiconductor and sensor applications
Functional Film:
- ITO, AZO, IGZO, ZnO:X, iZnO, ZnxSnyOz
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, PECVD, evaporation, FLA
Application:
- Contacts, reflector layers, optical filters, low-E , wear resistance and decorative layers
Functional Film:
- Mo, Cr, Al, Ag, Au, Cu, W, Ti, Ni, ZnTe, ZnTe:Cu, stainless steel
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, ALD, IBAD, IBE, RIE, PIII, FLA
Application:
- Barrier, passivation, absorption, reflection and anti-reflection, dielectric, decorative, low-E, wear resistance
Functional Film:
- SiO2, Al2O3, Ta2O5, Nb2O5, TiO2, ZrO2, HfO2, ZnO, WO3
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, PECVD, ALD, IBAD, IBE
Application:
- Barrier, passivation, absorption, reflection and anti-reflection, dielectric, low-E, decorative, wear resistance
Functional Film:
- SiOxNy, TiOxNy, AlOxNy
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, PECVD, ALD, IBAD, IBE
Application:
- Barrier, passivation, absorption, reflection and anti-reflection, dielectric, low-E, decoration, wear resistance
Functional Film:
- SiNx, TiN, AlN and other metal nitrides
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, PECVD, ALD, IBAD, IBE
Application:
- Soft and hard coatings, dielectric, anti-fingerprint, anti-scratch, electrolyte for electrochromics and batteries, substrate cleaning, ion milling, doping and surface patterning
Functional Film and Substrate:
- DLC, AlC, SiC, SiCxOyNz, LiPON and compounds
Si wafer, glass, polymer, metal sheet
Technology:
- MF, DC, DC pulse and RF magnetron sputtering, evaporation, IBAD, IBE, RIE, PIII, FLA