Mass Production Tools

Production coating equipment and process technology? Talk to us!

SOLAYER - Vertical Inline Coating

Vertical Inline Coating Tool

The vertical coating equipment is based on modular concept for PVD and PECVD technologies. The pre-assembled modules with integrated power pack provide fast and error-free installation. The unique substrate transportation reduces cost of ownership, footprint and maintenance.

SOLAYER - Horizontal Inline Coating

Horizontal Inline Coating Tool

The horizontal coating tool is manufactured for high throughput requirements. With a linear transfer system and parallel multi-process operation, the equipment also offers substrate cleaning, etching, deposition and annealing based on combined processes of sputtering, PECVD, ALD and FLA. 

SOLAYER - Optical Coating Tool

Precision Optics Tools

The modular scalable platforms  are designed to meet the requirements of 24/7 production environments for high-precision layers. The fully-automated coaters allow sputter deposition of high-quality layers that offer outstanding process flexibility for sophisticated stack designs. Read more

Specific solutions according to customer requirement

High substrate throughput

Highest target utilization

Fastest target exchange

High deposition rates

Safe and reliable production performance
Very high uniformity

Prepared for upgrades to meet future demands

Integration of advanced processes

"Production tools that deliver high substrate throughput, high deposition rate and highest target utilization at lowest cost of ownership. "