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Vertical Inline Coating Tool
The vertical coating equipment is based on modular concept for PVD and PECVD technologies. The pre-assembled modules with integrated power pack provide fast and error-free installation. The unique substrate transportation reduces cost of ownership, footprint and maintenance.
Horizontal Inline Coating Tool
The horizontal coating tool is manufactured for high throughput requirements. With a linear transfer system and parallel multi-process operation, the equipment also offers substrate cleaning, etching, deposition and annealing based on combined processes of sputtering, PECVD, ALD and FLA.
Precision Optics Tools
The modular scalable platforms are designed to meet the requirements of 24/7 production environments for high-precision layers. The fully-automated coaters allow sputter deposition of high-quality layers that offer outstanding process flexibility for sophisticated stack designs. Read more
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Specific solutions according to customer requirement
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High substrate throughput
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Highest target utilization
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Fastest target exchange
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High deposition rates
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Safe and reliable production performance
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Very high uniformity
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Prepared for upgrades to meet future demands
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Integration of advanced processes