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Modular FLA for Industry
The FLA modules are designed and manufactured to perform ultra-short annealing processes in industrial inline and R2R applications. The water-cooled lamp modules are ready for integration into existing inline tools, that can also be adapted for atmospheric coating systems.
FLA System for R & D
The FLA systems are designed as standalone laboratory systems for advanced semiconductor processing. The fully automatic thermal treatment system for R & D consists of flash lamp arrays, power supply cabinets and other components that are ready for cleanroom installation.
The Ion Implanter is a unique tool based on PBII technology to change or modify the surface properties of different materials, creating new phases and alloys, far away from the thermal equilibrium. It is based on a modular concept for ion implantation, doping and deposition processes.